Associated Faculty: Diebold, Geer, Lee, Oktyabrsky, Shahedipour-Sandvik

This track focuses on the design, processing, fabrication, testing, and integration of nanoelectronic structures and devices for incorporation in emerging gigascale and terascale integrated circuit systems and architectures. It also includes the development of integrated process modules for novel nanoelectronics materials.

Foundations Courses: Because this track is part of the Nanoscale Engineering program, it is recommended that students wishing to prepare for it pursue the Nanoengineering Qualifying Examination. Students without adequate background in the following subjects should take the corresponding Foundation Courses:

506 Crystallinity and Diffraction
506 Phase Equilibria
506 Kinetics and Transport
506 Mechanics of Materials
507 Quantum 1A
507 Quantum 1B
508 Electronic and Magnetic Properties
508 Optical/Photonic Properties
509 Deposition for Ultra-Thin Films
509 Nanoscale Device Principles
509 Surfaces and Interfaces
512 Quantum Theory of Solids II (3)

Track-Specific Coursework: Students must take 9 credits of track-specific coursework from the following list. These courses were selected to provide students with a sufficient flexibility to design an engineering program tailored to the needs of their Nanoelectronics research.

605 Integrated Circuit Manufacturing I (3)
608 Principles of Reliability for Semiconductor and Nanoscale Applications (3)
609 Electronics Packaging Fundamentals
616 Nanoelectronic Semiconductor Devices (3)
618 Science and Nanoengineering of Semiconductor Materials and Nanostructures (3)
621 Quantum Transport (3)
625 Quantum Processes in Solids and Nanostructures (3)
626 Quantum Processes in Solids and Nanostructures II (3)
661 Semiconductor Metrology (3)