Associated Faculty: Brainard, Denbeaux

This track emphasizes the design, development and engineering of nanolithography systems, components, and processes. Also included are the development and engineering of materials and metrologies for nanolithography.

Foundations Courses: Because this track is part of the Nanoscale Engineering program, it is recommended that students wishing to prepare for it pursue the Nanoengineering Qualifying Examination. Students without adequate background in the following subjects should take the corresponding Foundation Courses:

506 Crystallinity and Diffraction
506 Phase Equilibria
506 Kinetics and Transport
506 Mechanics of Materials
506 Practical Solid State Quantum
507 Molecular Materials
507 Nanoscale Laboratory Techniques
508 Electronic/Magnetic Properties
508 Optical/Photonic Properties
509 Deposition for Ultra-Thin Films
509 Nanoscale Device Principles
509 Surfaces and Interfaces

Track-Specific Coursework: Students must take 9 credits of track-specific coursework from the following list. These courses were selected to provide students with a strong foundation for their research in nanolithography.

605 Integrated Circuit Manufacturing I (3)
651 Fundamentals of Nanolithography I (3)
652 Fundamentals of Nanolithography II (3)