Course Descriptions

Required Courses: 9 credits
Requires three courses from below

  • MST 570 Design & Analysis of Experiments (online, asynchronous)
  • MST 680 Reliability and Quality Assurance (online, asynchronous)
  • TIM 500 Project Management (online, asynchronous)
  • TIM 530 Managing New Product Design and Development (online, asynchronous)

Tracks: 12 credits
Semiconductor Manufacturing Track:

  • MST 606 Semiconductor Practice and Facilities (online, asynchronous)
  • NNSE 605 Semiconductor Processing (online, synchronous or asynchronous)
  • NNSE 608 Principles of Reliability for Semiconductor and Nanoscale Applications (online, asynchronous)
  • NNSE 667 Surface Analysis of Nanostructures (online, asynchronous)

Semiconductor Management Track:

  • NNSE 513 Economic Principles of Nanotechnology Management (online, asynchronous)
  • NNSE 525 Innovation and Commercialization of Emerging Technologies (online, asynchronous)
  • NNSE 624 Finance and Valuation of Nanotechnology Based Firms (online, asynchronous)
  • BLW 570 Business Law, Ethics, and Intellectual Property Rights (online, asynchronous)

General Electives: 12 credits

  • MST 503 Special Topics in Advanced Technology (online, asynchronous)
  • MST 510 Engineering and Society (online, asynchronous)
  • NNSE 540 Introduction to Transmission electron microscopy (online, synchronous or asynchronous)
  • NNSE 665A Electron beam analysis (online, asynchronous)
  • TIM 500 Project Management (online, asynchronous)
  • MAT and STA courses 500+ level
  • All NNSE 500- and 600-level lecture and seminar courses can count towards major, with the following exceptions:
    • NNSE 504-509 Foundations of Nanotechnology series
    • NNSE 670 Transmission Electron Microscopy (take NNSE 540 instead)
    • NNSE 695-699 Research Problems and Master's Research

Advanced Technology

MST 503 Recent Advances in Technology (3)
This course will analyze current and future trends and original research advances in the two concentration areas of the MSAT program. The course will include seminars, invited lectures and visits. Team Taught.

MST 510 Engineering and Society (3)
The interaction between engineering and society has had many unexpected results. Students will learn how the major engineering systems have influenced society and how society changed the final design of the engineering systems. The course will look at both intended and unintended consequences of the final engineering design.

MST 570 Design and Analysis of Experiments (3)
The use of experiment design early in the product cycle can substantially reduce development lead time and cost, leading to processes and products that perform better in the field and have higher reliability than those developed by using other approaches. Students will learn principles as well as implementation of experimental design in developing products and manufacturing processes that are robust to environment factors and other sources of variability.

MST 606 Semiconductor Practice and Facilities (3) Fall 2021
A complete process flow for a cutting edge microelectronic structure (e.g., ReRAM array) is followed from design through interconnect metallization, focusing on lithography, deposition and etch processes. Course assignments will analyze actual metrology and electrical characterization data collected at various critical process stages from the on-site fab line. Split lots are used to correlate process variations with critical dimensions and device performance. Implications of material selection for device characteristics will be discussed as will fundamental principles of the associated fabrication techniques. Prerequisite: NNSE 605.

MST 680 Reliability and Quality Assurance (3)
This course is a study of applications of reliability-maintainability models, reliability testing and analysis, and quality engineering-design, process, control and quality
transformation. Prerequisite: Statistics, Statistical Quality Control or equivalent or consent of instructor.
Learn more about MST 680


BLW 570 Business Law, Ethics, and Intellectual Property Rights (3)
Designed to provide the student with the legal environment of business transactions including court structure and procedure, contracts, sales, commercial paper, secured financing, and property transactions. Covers the ethical aspects of business with particular emphasis to intellectual property (IP) rights as they relate to technology innovation and high technology environments. The IP issues which will be addressed include copyrights, patents, trademarks, software, domain names, licenses, royalties, and business processes.

Nanoscale Science and Engineering

NNSE 513 Economic Principles of Nanotechnology Management (3)
The principles of economics greatly impact the development of new technologies. Students are introduced to concepts such as markets, production, and consumer demand in order to understand how firms, customers, and government make decisions that will influence the creation, diffusion, and adoption of nanotechnologies. Students will also learn tools of strategic decision making critical to the nanotechnology development. Prerequisite: Consent of Instructor.
Learn more about NNSE 513

NNSE 525 Innovation and Commercialization of Emerging Technologies (2)
Legal aspects of innovation and technology transfer of emerging technologies, with an emphasis on nanotechnology and biotechnology. Topics include the fundamentals of intellectual property law, with a particular focus on the statutory and regulatory frameworks for technology transfer; nanoengineering basics and the law affecting nanotechnologies; customer discovery in the university setting; intellectual property strategy and licensing frameworks, with both startups and established industry partners; artificial intelligence: law, applications, and ethics; the law, science and ethics of the human genome and bioinformatics; intellectual property in the life sciences,
from seed investment to Initial Public Offering; and the role of the state government in innovation and economic development.

NNSE 540 Introducotry Transmission Electron Microscopy Lecture (3)
Lecture-only course (including remote learning option) covering the basics of nanoscale analysis by transmission electron microscopy, in 3 units: Instrumentation, Diffraction & Imaging. Theoretical & practical treatment of such essential topics as modern instrumentation including electron guns; electron optics; electron diffraction & Kikuchi mapping; kinematic and dynamic theory of image contrast; bright-field/dark-field and weak-beam imaging techniques; dislocation analysis; phase contrast & z-contrast imaging. Course includes 2 unit exams, and a final report.

NNSE 605 Integrated Circuit Manufacturing I (3)
Covers basic tools and principles of chip construction. Describes structural and electrical differences between logic, dram, flash, etc. types of devices. Covers in detail how a chip is constructed and some of the problem areas encountered. Fundamental modules of ion implantation, pecvd, Lpcvd, Rie behavior, control of profiles, diffusion, Lithography, yield control tactics, deposition, oxidation kinetics, as well as future changes in the technology over the next 10 years will be covered. Future changes will be understood in terms of factors that drive speed of Microprocessors.
Learn more about NNSE 605

NNSE 608 Principles of Reliability for Semiconductor and Nanoscale Applications (3)
Ensuring reliability is commonly one of the most important and time consuming (expensive) efforts accompanying process and product development, yet the degradation processes in small (e.g. nanoscale) devices often challenge our understanding of materials science and the physical principles of failure. This course will introduce the student to the fundamentals of reliability theory and the science of materials degradation as related to semiconductor, MEMS and NEMS devices leading to an appreciation and an understanding of how materials fail. Basic statistics and thermodynamics as applied to reliability will be discussed. Upon completion of this, detailed descriptions of the known failure mechanisms will be described as well as accelerated reliability testing and data manipulation to extract failure rates and to design qualification testing programs
to ensure reliability. Prerequisite: Permission of instructor.
Learn more about NNSE 608

NNSE 624 Finance and Valuation of Nanotechnology Based Firms (3)
This course will cover elements of entrepreneurial finance, focusing on nanotechnology based start-up ventures. The first part of the course will cover models that can be used for valuing nanotechnology based firms. The second part will address key questions which entrepreneurs in nanotechnology based industries face: how much money can and should be raised, when should it be raised and from whom, and how funding should be structured. The subject aims to prepare students for these decisions as entrepreneurs in nanotechnology related industries. Prerequisites: Open to graduate students in the CNSE or Departments of Economics, School of Business, with permission of instructor.
Learn more about NNSE 624

NNSE 665A Electron Beam Analysis of Nanostructures (3)
First Part of a two-semester course on the application of electron beam techniques to the extraction of morphological, chemical and crystallographic information about nanomaterials. This course will provide a detailed understanding of the scanning electron microscope including electron probe formation, electron solid interactions, and the measurement and analysis of a variety of emitted signals including secondary and backscattered electrons, x-rays and cathodoluminescent.

NNSE 667 Surface Analysis of Nanostructures (3)
This course will look at a variety of currently used surface analytical techniques for the  examination of nanomaterials and nanomaterial systems including Rutherford backscattering, nuclear reaction analysis, secondary ion microanalysis, proton excited x-ray analysis, atomic force microscopy, ultrasonic force microscopy, low energy electron diffraction, and x-ray photoelectron spectroscopy and compare them with regard to sensitivity, spatial and depth resolution, sample requirements and the kinds of information they can provide in the examination of nanostructures and materials. Prerequisite: Permission of Instructor.
Learn more about NNSE 667

NNSE 680 Seminar in Nanosciences and Nanoengineering (1-3)
Advanced individual theoretical and experimental work, conferences, and reports. May be taken in either semester or both.

Technology Information Management

TIM 500 Project Management (3)
Reviews traditional project management techniques and project based organizational structures. Special attention is given to the integration of project management with technology and strategic objectives. Organizational issues, project tracking, the project manager, and project management techniques are examined both from the conceptual and the applied aspects. The potential for transferring knowledge gained from projects to multiple areas in the organization is also covered. Students will experience computer application software to support and implement project management activities.
Learn more about TIM 500

TIM 530 Managing New Product Design and Development (3)
Regardless of the industry or business involved, careful attention must be given to the way new products are designed and developed. Various aspects of product design and development are studied; including the functions of research and development, marketing, finance, design, manufacturing, and technical specifications. Special attention is given to the tools and methodologies necessary in the creation and development of a new product. An important focus of this course is on the challenges and perspectives presented by products that result from high technology environments or are themselves “high technology products.” Prerequisites: TIM 500 or permission of instructor.
Learn more about TIM 530


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