News Release: TEL Technology Center Awards $2.3M to SUNY Poly for Research, Recruitment, and Training Initiatives Related to Plasma Science

News Release: TEL Technology Center Awards $2.3M to SUNY Poly for Research, Recruitment, and Training Initiatives Related to Plasma Science

Monday, October 5, 2020 - 11:33
Research News
SUNY Poly Students in the News
News Releases
Dr. Vallee

For Release:           Immediate – October 5, 2020
Contact:                  Steve Ference, Director of University Communications | (518) 429-7742 |

Grant Leverages SUNY Poly’s Academic Excellence and Provides Access to Cutting-Edge Research to Support Thriving Semiconductor Industry

Dr. Christophe Vallée Chosen as the First TEL Innovation Scientist at SUNY Poly CNSE

ALBANY, NY – SUNY Polytechnic Institute (SUNY Poly) today announced its College of Nanoscale Science and Engineering (CNSE) has been awarded $2.3 million by Tokyo Electron Limited (TEL) to develop advanced research technologies through the creation of a new program to aid the semiconductor industry. The research will focus on the study of sub-10 nm transistor production in the field of plasma science and further support targeted educational opportunities.

This long-term collaboration will now allow for the expansion of the scope of SUNY Poly’s current research program in the area of plasma science for both etch and deposition through new areas such as selective deposition. This effort will be fostered by the selection of Dr. Christophe Vallée as the first TEL Innovation Scientist at SUNY Poly. Dr. Vallée will utilize both TEL equipment and SUNY Poly metrology services to conduct the research over a five-year period with as many as five SUNY Poly graduate students and one post-doctoral fellow.

“SUNY Poly is thrilled to collaborate with our neighbor, TEL, to welcome Dr. Vallée as we engage our talented graduate students and post-doctoral fellow to further advance research in plasma science,” said SUNY Poly Interim President Dr. Grace Wang. “SUNY Poly’s longstanding partnership with TEL continues to strengthen both organizations as leaders in the field of semiconductor research.”

“TEL is excited to partner with SUNY Poly to advance fundamental research in the area of plasma etch and deposition, while also training the next generation of engineers and scientists to join the ranks of our vibrant and dynamic industry,” said Tokyo Electron U.S. Holdings President Larry Smith. “Over the past several years, TEL has hired several SUNY Poly students and interns and we look forward to deepening our engagement with this next level of interaction with SUNY Poly.”

In addition to its significant technical collaborations, SUNY Poly has partnered with TEL for decades to promote internship and research opportunities for graduate and undergraduate students. Within the past academic year, TEL has offered more than a dozen internship and employment opportunities to SUNY Poly students at TEL’s Albany location. TEL managers, in partnership with SUNY Poly’s Office of Graduate Studies, have also selected top-notch Ph.D. students to conduct leading-edge research for TEL in areas related to new metal etch for back-end applications to improve device performance at lower technology nodes (e.g. smaller devices) and process development for neuromorphic and AI Applications, as well as superconducting materials and devices for quantum technologies. 

“This collaboration between SUNY Poly and TEL will allow for the advancement of these new programs in the areas of etch and deposition in the field of plasma science, and we are eager to welcome Dr. Vallée to his new role,” said Dr. André Melendez, SUNY Poly Interim Dean of CNSE. “We are also optimistic this partnership will lead to hands-on educational opportunities for SUNY Poly’s students as we seek to further the state-of-the-art at SUNY Poly.”

“We are thrilled to enable students to participate in such impactful research projects that have the potential to improve society for years to come,” said Krista Thompson, SUNY Poly Assistant Dean of Graduate Studies.

Research goals include developing a long-term, well-funded research program in plasma surface interactions, working with 300 mm cleanroom faculty and staff to establish a process flow for plasma etch deposition, establishing partnerships with collaborative research, increasing the 200 nm laboratory capabilities in the area of plasma and vacuum technology, and expanding workforce training and plasma science curriculum development.



About Tokyo Electron Limited (TEL)
As a leading global company of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron Limited (TEL) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network of approximately 78 locations in 18 countries in the U.S., Europe, and Asia.
For more information, visit:

About SUNY Polytechnic Institute (SUNY Poly)
SUNY Poly is New York’s globally recognized, high-tech educational ecosystem. SUNY Poly offers undergraduate and graduate degrees in the emerging disciplines of nanoscience and nanoengineering, as well as cutting-edge nanobioscience and nanoeconomics programs at its Albany campus, and undergraduate and graduate degrees in technology, including engineering, cybersecurity, computer science, and the engineering technologies; professional studies, including business, communication, and nursing; and arts and sciences, including natural sciences, mathematics, humanities, and social sciences at its Utica/Rome campus; thriving athletic, recreational, and cultural programs, events, and activities complement the campus experience. As the world’s most advanced, university-driven research enterprise, SUNY Poly boasts billions of dollars in high-tech investments and hundreds of corporate partners since its inception. For information visit