Semiconductor Engineering: SUNY Poly's Dr. Alain Diebold discusses metrology for manufacturing nanosheet and nanowire FETs

Semiconductor Engineering: SUNY Poly's Dr. Alain Diebold discusses metrology for manufacturing nanosheet and nanowire FETs

Published:
Friday, April 17, 2020 - 11:20
SUNY Poly Faculty in the News
Alain Diebold

Semiconductor Engineering

Metrology is the art of measuring and characterizing structures in devices. Measuring and characterizing structures in devices has become more difficult and expensive at each new node, and the introduction of new types of transistors is making this even harder. Even though gate-all-around FETs are considered an evolutionary step from finFETs, with a boost in performance, they are expensive and difficult to make.

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