Semiconductor Engineering: SUNY Poly's Dr. Alain Diebold discusses metrology for manufacturing nanosheet and nanowire FETs
Semiconductor Engineering
Metrology is the art of measuring and characterizing structures in devices. Measuring and characterizing structures in devices has become more difficult and expensive at each new node, and the introduction of new types of transistors is making this even harder. Even though gate-all-around FETs are considered an evolutionary step from finFETs, with a boost in performance, they are expensive and difficult to make.