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SUNY Poly’s Albany NanoTech Complex, home to the College of Nanoscale Science and the College of Nanoscale Engineering and Technology Innovation, is a fully-integrated research, development, prototyping, and educational facility that provides strategic support through outreach, technology acceleration, business incubation, pilot prototyping, and test-based integration support for onsite corporate partners including IBM, GlobalFoundries, Samsung, TSMC, Applied Materials, Tokyo Electron, ASML and Lam Research, as well as other “next generation” nanotechnology research activities.
The Zero Energy Nanotechnology (ZEN) building, completed in 2015, is SUNY Poly’s most recent expansion project, a 356,000-square-foot facility that serves as a living laboratory for clean and renewable energy technologies.
NanoFab Xtension, completed in 2013, is a 500,000-square-foot facility with 50,000 square feet of 300mm wafer cleanrooms.
NanoFab East, a 250,000-square-foot office, laboratory and classroom building and NanoFab Central, a separate 100,000-square-foot building that houses 15,000 square feet of 300mm wafer, class 1 capable cleanroom space were part of a project completed in March 2009.
NanoFab North, completed in December 2005, is a 228,000 square foot facility that includes 35,000 square feet of cleanroom space with Class 1 capable 300mm wafer production. The NFN facility also houses the world’s first extreme ultraviolet (“EUV”) Alpha Demo Tool, developed by ASML.
NanoFab South, completed in March 2004, is a 150,000 square foot facility that includes 32,000 square feet of cleanroom space. The facility also includes classrooms, undergraduate and graduate student lounges and offices.
NanoFab 200 (also known as CESTM) was completed in June 1997. This 70,000 square foot facility includes 4,000 square feet of cleanroom space, plus SUNY Poly metrology labs and office space for programs such as the State University of New York’s Atmospheric Sciences Research Center.
In sum, the 1.65 million square-foot NanoTech megaplex boasts billions of dollars in high-tech investments and over 300 corporate partners to date, with thousands of R&D jobs on site.