Growth Techniques
- Veeco D180 MOCVD Reactor
- Veeco D75 MOCVD Reactor
Characterization Techniques
- k-Space kSA ICE system for in-situ stress, temperature, and reflectance monitering
- PL (LT and RT) set up with excitation sources of 325nm (He-Cd) and 225nm (He-Ag, pulsed) with an Oriel monochrometer 200-5000nm
- Closed cycle cryostat, temperature range from 7K to RT
- Computer controlled home-made Electroluminscence measurement system
- Computer controlled home-made Internal Photoemission Characterization system
- Keithley 6430 sub-femto amp remote sourcemeter (IV)
- Keithley 4200 parameter analyzer
- Newport Xenon 50-500W Xenon Lamp source
- Accent Hall Measurement setup
- Ocean Optics thickness measurement
- FEI Titan 3 (TEM)
- JEOL 200 CX Transmission Electron Microscope (TEM)
- LEO 1550 Scanning Electron Microscope (SEM)
- Bruker XFlash 6061 (EDS)
- FEI Focused Ion Beam System (FIB)
- Bruker D8 ADVANCE X-ray Diffractometer (XRD)
- Bede Metrix-L High Resolution X-ray Diffractometer (HR-XRD)
- Veeco Dimension 3100 Atomic Force Microscope (AFM)
- Bruker Dimension Icon scanning probe microscope for Atomic force microscopy (AFM)
- Thermo Scientific Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (XPS)
- PHI 6650 quadrupole secondary ion mass spectroscopy (SIMS)
- IonTof V 300 TOF SIMS
- Linear Accelerator
Lithography and Processing Tools:
- OAI Contact Aligner
- E-Beam Evaporator
- RTA and Lateral Oxidation Furnace
- Spin coater, plasma asher and other supporting tools
Our group also has access to the fully integrated research, development, prototyping and metrology tools at the Albany NanoTech Complex.
