The etch module processes listed below are available from the SUNY Poly 300 fabrication facilities:
Line/Space STI Etch Process
Line/Space Gate with Spacer Etch Process
Contacts
Trench (M1)
Trench/VIAS (M2 V1)
The etch module processes listed below are available from the SUNY Poly 300 fabrication facilities:
Line/Space STI Etch Process
Line/Space Gate with Spacer Etch Process
Contacts
Trench (M1)
Trench/VIAS (M2 V1)