Trench/VIAS (M2 V1)

  • Dual Damascene in k=2.7 or 3.0 Dielectric
    • 600A TEOS Hard Mask
    • 3300 or 5300A LoK Dielectric
    • 350A SiCN
    • Via Litho
    • Via RIE
    • Trench Litho
    • Trench RIE

Trench/VIAS (M2 V1)

 

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