Tools - Four Applied Materials Producers
FEOL Films:
- HARP - STI trench fill
- Compressive and Tensile Nitride
- Oxide Spacer
- Nitride Spacer
- Advance Patterning Film/Amorphous Carbon Layer
- PMD Oxide
BEOL Films:
- SiCOH/OMCTS (k=3.0) (BD)
- pSiCOH (k=2.4, 2.7) with UV cure (BD)
- Silane Oxide and Nitride
- SiCN
- TEOS