Dielectric Films

Tools - Four Applied Materials Producers

FEOL Films:

  • HARP - STI trench fill
  • Compressive and Tensile Nitride
  • Oxide Spacer
  • Nitride Spacer
  • Advance Patterning Film/Amorphous Carbon Layer
  • PMD Oxide

BEOL Films:

  • SiCOH/OMCTS (k=3.0) (BD)
  • pSiCOH (k=2.4, 2.7) with UV cure (BD)
  • Silane Oxide and Nitride
  • SiCN
  • TEOS

 

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