Metal and HiK Films

The following 300mm metalization processes are available at the SUNY Poly fabrication facilities.

Tools: Applied Materials Endura - Anelva

FEOL Films:
NiPt (5%)
Ti, TiN, TiOx
Si
Ta, TaN, TaOx
LaOx

BEOL Films:
Ta, TaN
Cu
CVD Co
Ti 

200nm image100nm image

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