High Current

This uses the following sources:

  • AsH3
  • PH3
  • BF3
  • Xenon
  • CO2
  • N2
  • GeF4

Species Range: 1e13 - 3e16 tool spec, 1e14-5e15 typical
Energy Range: 0.2 keV - 60keV (single charge)
Tilt: 45 degree max

Varian 900XP Medium Current Ion Implanter
This tool uses the following sources:

  • AsH3
  • PH3
  • BF3 Enriched
  • Xenon
  • SiF4, Optional - not currently on tool
  • SbF3
  • InCl3

Species Range: 3e11 - 1e14 tool spec, 1e12-1e14 typical
Energy Range: 2keV - 300keV (single charge), 900keV max (triple charge)
Tilt: 45 degree max

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