- FEOL Applied Materials Reflexion LK
- Profiler and Contour Heads
- FA and Slurry processes
- Endpoint - Motor Torque, FullVision
- IPA Dryer
- NOVA on-board metrology
- BEOL Applied Materials Reflexion LK
- Profiler and Contour heads
- Endpoint - RTPC, FullScan ISRM
- IPA Dryer
- iMap on-board metrology
- BEOL Ebara F-Rex 300S
- GII and GIII Heads
- Endpoint - Eddy Current, S-OPM
- IPA Dryer