CMP Tools

  • FEOL Applied Materials Reflexion LK
    • Profiler and Contour Heads
    • FA and Slurry processes
    • Endpoint - Motor Torque, FullVision
    • IPA Dryer
    • NOVA on-board metrology
  • BEOL Applied Materials Reflexion LK
    • Profiler and Contour heads
    • Endpoint - RTPC, FullScan ISRM
    • IPA Dryer
    • iMap on-board metrology
  • BEOL Ebara F-Rex 300S
    • GII and GIII Heads
    • Endpoint - Eddy Current, S-OPM
    • IPA Dryer

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