The Mask sets listed below are available from the SUNY Poly 300mm fabrication facilities:

90nm       65nm       32nm       TSV

• 48 & 70nm Testable SERP & COMB structures & M1 and M2
  • Smaller geometries obtainable through RIE shrink process
• Low-k Films w/ k= 3.0 & 2.4 available
• Physical trench structures down to 44nm 1:1
  • Via chains M1 : 70nm, V1 : 70nm, M2 : 100nm
    • (48, 48, 100) a few chains up to 10k

Sample mask set options

Integrated MOSCAP
Integrated Planar CMOS
Integrated Non-Planar FinFET
Other Routing Options