At SUNY, we possess state-of-the-art Signatone HV (20kV) probe station and Keithley semiconducting analyzers to characterize the on-wafer level static performance of the power devices.

Signatone Probe Station

• Model: S-1160B-6N manual analytical probe system
• The 20kV chuck accommodates up to 150mm wafer and thermal system from 0 to 200°C
• Digital imaging system is available

Power supply and Semiconducting Analyzers

• Keithley 2636B SMU: dual channel, source up to 200V. Max. current: [DC 1.5A@20V] [pulse 10A@5V]
• 30kV Power supply

A 20kV manual analytical probe system enclosed in a dark box	A 20kV high voltage probe holder over a 20kV thermal chuck