Device Characterization (LV)

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At SUNY, we position Cascade/FormFactor probe station and Keithley semiconducting analyzers. We can characterize on-wafer level static performances and capacitances at various temperatures for both diodes and MOSFETs.

Cascade/Form Factor Probe Station

  • Model: SUMMIT 200 (T200) manual probe station
  • The chuck accommodates up to 200mm wafer and thermal system from 0 to 200°C
  • Digital imaging system is available

Keithley Semiconducting Analyzers

  • 2636B SMU: dual channel, source up to 200V. Max. current: [DC 1.5A@20V] [pulse 10A@5V]
  • 2651A SMU: single channel, Max. current: [DC 20A @10V] [pulse 50A@40V]
  • 2651A SMU: single channel, Max. current: [DC 20A @10V] [pulse 50A@40V]
  • 2657A SMU: single channel, source up to 3000V. Current range: 1A~1×10-12A
  • 4200A SCS: measures capacitance
Image of the probe station Image of the analyzers
Image of probe station

Image of the analyzers

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