Two metal-organic chemical vapor deposition (MOCVD) growth systems with the capability to grow BN, GaN, AlN, InN, and their alloys, along with Si, Mg, and Be dopants
- Veeco D180 Vertical-Flow Cold-Wall MOCVD
- Can accommodate up to six 2” wafers
- Veeco D75 Vertical-Flow Cold-Wall MOCVD
- Can accommodate one 2” wafer
- Boasts extremely high growth uniformity
Image of D180 MOCVD | Image of the D75 MOCVD |