III-Nitride MOCVD

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Two metal-organic chemical vapor deposition (MOCVD) growth systems with the capability to grow BN, GaN, AlN, InN, and their alloys, along with Si, Mg, and Be dopants

  • Veeco D180 Vertical-Flow Cold-Wall MOCVD
    • Can accommodate up to six 2” wafers
  • Veeco D75 Vertical-Flow Cold-Wall MOCVD
    • Can accommodate one 2” wafer
    • Boasts extremely high growth uniformity
Image of the D180 MOCVD Image of the D75 MOCVD
Image of D180 MOCVD Image of the D75 MOCVD

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